minimum detectable quantity

SO₂+SOF₂、H₂S、HF

≤0.1µL/L

CO/H₂

≤0.5µL/L

purity

≤0.03%（V/V)

Dew point: resistance capacitance

≤0.1℃

precision

SO₂+SOF₂、H₂S、HF

measurement value≤ 10 µL/L, error ≤ ± 0.5 µL/L

measured value > 10 µL/L, error ≤ ± 5%.

CO/H₂

measurement value ≤ 50 µL/L, error ≤ ± 2.0 µL/L

measurement value > 50 µL/L, error ≤ ± 4%

purity

≤±0.1 %(W/W)

resistance capacitance/mirror

≤±1℃/±0.3℃

repeatability

SO₂+SOF₂ 、H₂S、HF

measured value  ≤ 10 µL/L, ≤ 0.2 µL/L

10μL/L～100μL/L:2%.

CO/H₂

measured value is ≤ 50 µL/L, ≤ 1.5 µL/L

detection value ：50 µL/L ~1000 µL/L: ≤ 3%

purity

≤0.05%(W/W)

resistance capacitance/mirror

＜1%（RSD）

range

SO₂+SOF₂

0～100µL/L,0～2000µL/L

H₂S

0～100µL/L

HF

0～20µL/L

CO/H₂

0～1000µL/L

purity

0～100%

resistance capacitance/mirror

-80℃～+20℃/-60℃～+20℃@30℃